JPH0159803U - - Google Patents

Info

Publication number
JPH0159803U
JPH0159803U JP15584487U JP15584487U JPH0159803U JP H0159803 U JPH0159803 U JP H0159803U JP 15584487 U JP15584487 U JP 15584487U JP 15584487 U JP15584487 U JP 15584487U JP H0159803 U JPH0159803 U JP H0159803U
Authority
JP
Japan
Prior art keywords
detected
image
distortion
detecting
lattice pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15584487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15584487U priority Critical patent/JPH0159803U/ja
Publication of JPH0159803U publication Critical patent/JPH0159803U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP15584487U 1987-10-12 1987-10-12 Pending JPH0159803U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15584487U JPH0159803U (en]) 1987-10-12 1987-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15584487U JPH0159803U (en]) 1987-10-12 1987-10-12

Publications (1)

Publication Number Publication Date
JPH0159803U true JPH0159803U (en]) 1989-04-14

Family

ID=31433836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15584487U Pending JPH0159803U (en]) 1987-10-12 1987-10-12

Country Status (1)

Country Link
JP (1) JPH0159803U (en])

Similar Documents

Publication Publication Date Title
JPH0159803U (en])
JPH0357688U (en])
JPS6224581U (en])
JPH0257688U (en])
JPS5863747U (ja) 電子ビ−ムを用いるパタ−ン検査装置
JPH0164057U (en])
JPS62168436U (en])
JPH0310249U (en])
JPS62111506U (en])
JPS62150612U (en])
JPH0226867U (en])
JPH0411407U (en])
JPS61195672U (en])
JPS6428069U (en])
JPS63105008U (en])
JPS6415952U (en])
JPH0164260U (en])
JPS6381484U (en])
JPS5995235U (ja) サ−モグラフイ装置
JPH0415383U (en])
JPS63183533U (en])
JPS62183354U (en])
JPH02128905U (en])
JPS62197104U (en])
JPH0344606U (en])